Detail publikace

Analysis of the Impact of the Baffle Placement in the Supersonic Flow in the Differentially Pumped Chamber

BÍLEK, M.

Originální název

Analysis of the Impact of the Baffle Placement in the Supersonic Flow in the Differentially Pumped Chamber

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

The thesis follows to the work of G.D. Danilatos occupy Differential Pumping System with fast stopper focusing on dew design for environmental scanning electron microscope. Thesis concern divider located in the chamber differntial pumping and its influence on the nature of the flow. Simulation of individual vairants was evaluated using the program Ansys Fluent, which caluvulates with the method final volumes as opposed to calculations performed by G.D. Danilatos which uses the statistical method Monte Carlo.

Klíčová slova

Environmental scanning electron microscope (ESEM), ANSYS Fluen, Differentially pumped chambe

Autoři

BÍLEK, M.

Vydáno

20. 10. 2018

ISBN

978-80-214-5109-4

Kniha

ECS Transactions

ISSN

1938-5862

Periodikum

ECS Transactions

Číslo

1

Stát

Spojené státy americké

Strany od

45

Strany do

50

Strany počet

5

BibTex

@inproceedings{BUT150632,
  author="Michal {Bílek}",
  title="Analysis of the Impact of the Baffle Placement in the Supersonic Flow in the Differentially Pumped Chamber",
  booktitle="ECS Transactions",
  year="2018",
  journal="ECS Transactions",
  number="1",
  pages="45--50",
  doi="10.1149/08701.0405ecst",
  isbn="978-80-214-5109-4",
  issn="1938-5862"
}