Publication detail

Cyclic Silylselenides: Convenient Selenium Precursors for Atomic Layer Deposition

CHARVOT, J. POKORNÝ, D. ZAZPE, R. KRUMPOLEC, R. PAVLIŇÁK, D. HROMÁDKO, L. PŘIKRYL, J. RODRIGUEZ-PEREIRA, J. KLIKAR, M. JELÍNKOVÁ, V. MACÁK, J. BUREŠ, F.

Original Title

Cyclic Silylselenides: Convenient Selenium Precursors for Atomic Layer Deposition

Type

journal article in Web of Science

Language

English

Original Abstract

Three cyclic silylselenides were prepared in a straightforward manner. Property tuning has been achieved by varying the ring size and the number of embedded selenium atoms. All silylselenides possess improved resistance towards moisture and oxidation as well as high thermal robustness and sufficient volatility with almost zero residues. The six-membered diselenide proved to be particularly superior Se precursors for atomic layer deposition and allowed facile preparation of MoSe2 layers. Their structure and composition have been investigated by Raman and X-ray photoelectron spectroscopy as well as scanning electron microscopy revealing vertically aligned flaky shaped nanosheets.

Keywords

atomic layer deposition; molybdenum; nanostructures; selenium; transition metal dichalcogenides

Authors

CHARVOT, J.; POKORNÝ, D.; ZAZPE, R.; KRUMPOLEC, R.; PAVLIŇÁK, D.; HROMÁDKO, L.; PŘIKRYL, J.; RODRIGUEZ-PEREIRA, J.; KLIKAR, M.; JELÍNKOVÁ, V.; MACÁK, J.; BUREŠ, F.

Released

1. 3. 2020

Publisher

WILEY-V C H VERLAG GMBH

Location

WEINHEIM

ISBN

2192-6506

Periodical

ChemPlusChem

Year of study

85

Number

3

State

Federal Republic of Germany

Pages from

576

Pages to

579

Pages count

4

URL

https://chemistry-europe.onlinelibrary.wiley.com/doi/full/10.1002/cplu.202000108

BibTex

@article{BUT164061,
  author="Jaroslav {Charvot} and Daniel {Pokorný} and Raúl {Zazpe Mendioroz} and Richard {Krumpolec} and David {Pavliňák} and Luděk {Hromádko} and Jan {Přikryl} and Jhonatan {Rodriguez Pereira} and Milan {Klikar} and Veronika {Jelínková} and Jan {Macák} and Filip {Bureš}",
  title="Cyclic Silylselenides: Convenient Selenium Precursors for Atomic Layer Deposition",
  journal="ChemPlusChem",
  year="2020",
  volume="85",
  number="3",
  pages="576--579",
  doi="10.1002/cplu.202000108",
  issn="2192-6506",
  url="https://chemistry-europe.onlinelibrary.wiley.com/doi/full/10.1002/cplu.202000108"
}