Detail publikace

Cyclic Silylselenides: Convenient Selenium Precursors for Atomic Layer Deposition

CHARVOT, J. POKORNÝ, D. ZAZPE, R. KRUMPOLEC, R. PAVLIŇÁK, D. HROMÁDKO, L. PŘIKRYL, J. RODRIGUEZ-PEREIRA, J. KLIKAR, M. JELÍNKOVÁ, V. MACÁK, J. BUREŠ, F.

Originální název

Cyclic Silylselenides: Convenient Selenium Precursors for Atomic Layer Deposition

Typ

článek v časopise ve Web of Science, Jimp

Jazyk

angličtina

Originální abstrakt

Three cyclic silylselenides were prepared in a straightforward manner. Property tuning has been achieved by varying the ring size and the number of embedded selenium atoms. All silylselenides possess improved resistance towards moisture and oxidation as well as high thermal robustness and sufficient volatility with almost zero residues. The six-membered diselenide proved to be particularly superior Se precursors for atomic layer deposition and allowed facile preparation of MoSe2 layers. Their structure and composition have been investigated by Raman and X-ray photoelectron spectroscopy as well as scanning electron microscopy revealing vertically aligned flaky shaped nanosheets.

Klíčová slova

atomic layer deposition; molybdenum; nanostructures; selenium; transition metal dichalcogenides

Autoři

CHARVOT, J.; POKORNÝ, D.; ZAZPE, R.; KRUMPOLEC, R.; PAVLIŇÁK, D.; HROMÁDKO, L.; PŘIKRYL, J.; RODRIGUEZ-PEREIRA, J.; KLIKAR, M.; JELÍNKOVÁ, V.; MACÁK, J.; BUREŠ, F.

Vydáno

1. 3. 2020

Nakladatel

WILEY-V C H VERLAG GMBH

Místo

WEINHEIM

ISSN

2192-6506

Periodikum

ChemPlusChem

Ročník

85

Číslo

3

Stát

Spolková republika Německo

Strany od

576

Strany do

579

Strany počet

4

URL

https://chemistry-europe.onlinelibrary.wiley.com/doi/full/10.1002/cplu.202000108

BibTex

@article{BUT164061,
  author="Jaroslav {Charvot} and Daniel {Pokorný} and Raúl {Zazpe Mendioroz} and Richard {Krumpolec} and David {Pavliňák} and Luděk {Hromádko} and Jan {Přikryl} and Jhonatan {Rodriguez Pereira} and Milan {Klikar} and Veronika {Jelínková} and Jan {Macák} and Filip {Bureš}",
  title="Cyclic Silylselenides: Convenient Selenium Precursors for Atomic Layer Deposition",
  journal="ChemPlusChem",
  year="2020",
  volume="85",
  number="3",
  pages="576--579",
  doi="10.1002/cplu.202000108",
  issn="2192-6506",
  url="https://chemistry-europe.onlinelibrary.wiley.com/doi/full/10.1002/cplu.202000108"
}