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NOVOTNÁ, V., HORÁK, J., KONEČNÝ, M., HEGROVÁ, V., NOVOTNÝ, O., NOVÁČEK, Z., NEUMAN, J.
Original Title
AFM-in-SEM as a Tool for Comprehensive Sample Surface Analysis
Type
journal article - other
Language
English
Original Abstract
Key features and applications of a unique atomic force microscope (AFM), the LiteScope™, which can be integrated into a scanning electron microscope (SEM) is reported. Using the AFM-in-SEM as one tool combines the capabilities of both systems in a very efficient way. The LiteScope design features advanced Correlative Probe and Electron Microscopy (CPEM)™ imaging technology that allows simultaneous acquisition of multiple AFM and SEM signals and their precise in-time correlation into a 3D CPEM view. AFM-in-SEM advantages are presented using several examples of applications and AFM measurement modes including CPEM, material electrical and mechanical properties together with nanoindentation, and focused ion beam (FIB) applications.
Keywords
atomic force microscopy; scanning electron microscopy; correlative microscopy; AFM-in-SEM; nanoindentation
Authors
Released
18. 5. 2020
ISBN
2150-3583
Periodical
Microscopy Today
Year of study
28
Number
3
State
United Kingdom of Great Britain and Northern Ireland
Pages from
38
Pages to
46
Pages count
9
URL
https://doi.org/10.1017/S1551929520000875
BibTex
@article{BUT164118, author="Martin {Konečný}", title="AFM-in-SEM as a Tool for Comprehensive Sample Surface Analysis", journal="Microscopy Today", year="2020", volume="28", number="3", pages="38--46", doi="10.1017/S1551929520000875", issn="2150-3583", url="https://doi.org/10.1017/S1551929520000875" }