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NOVOTNÁ, V., HORÁK, J., KONEČNÝ, M., HEGROVÁ, V., NOVOTNÝ, O., NOVÁČEK, Z., NEUMAN, J.
Originální název
AFM-in-SEM as a Tool for Comprehensive Sample Surface Analysis
Typ
článek v časopise - ostatní, Jost
Jazyk
angličtina
Originální abstrakt
Key features and applications of a unique atomic force microscope (AFM), the LiteScope™, which can be integrated into a scanning electron microscope (SEM) is reported. Using the AFM-in-SEM as one tool combines the capabilities of both systems in a very efficient way. The LiteScope design features advanced Correlative Probe and Electron Microscopy (CPEM)™ imaging technology that allows simultaneous acquisition of multiple AFM and SEM signals and their precise in-time correlation into a 3D CPEM view. AFM-in-SEM advantages are presented using several examples of applications and AFM measurement modes including CPEM, material electrical and mechanical properties together with nanoindentation, and focused ion beam (FIB) applications.
Klíčová slova
atomic force microscopy; scanning electron microscopy; correlative microscopy; AFM-in-SEM; nanoindentation
Autoři
Vydáno
18. 5. 2020
ISSN
2150-3583
Periodikum
Microscopy Today
Ročník
28
Číslo
3
Stát
Spojené království Velké Británie a Severního Irska
Strany od
38
Strany do
46
Strany počet
9
URL
https://doi.org/10.1017/S1551929520000875
BibTex
@article{BUT164118, author="Martin {Konečný}", title="AFM-in-SEM as a Tool for Comprehensive Sample Surface Analysis", journal="Microscopy Today", year="2020", volume="28", number="3", pages="38--46", doi="10.1017/S1551929520000875", issn="2150-3583", url="https://doi.org/10.1017/S1551929520000875" }