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Publication detail
Ni, S. Zhu, HL. Neuzil, P. Yobas, L.
Original Title
A SiN Microcalorimeter and a Non-Contact Precision Method of Temperature Calibration
Type
journal article in Web of Science
Language
English
Original Abstract
A dual-channel flow-through microcalorimeter device is presented along with a non-contact precision method of temperature calibration. A microfluidic channel with a volume of approximate to 550 pL in a spiral layout was fabricated from low-stress nitride suspended over a cavity in a silicon substrate. The thin-film heater and resistive temperature detector (RTD) on the channel were defined by a patterned Ti layer. The device exhibited a rapid thermal response with the following thermal characteristics: a time constant of approximate to 10.5 ms, a heat conductance of approximate to 152 mu W. K-1 and a heat capacitance of approximate to 1.6 mu J . K-1 on average based on the measurements of nine separate units fabricated on the same wafer. Further, the melting curve analysis (MCA) of a double-stranded DNA was proposed as a non-contact method of microcalorimeter RTD calibration. The method revealed that the measurement by the RTD underestimates the temperature of the channel interior by an amount of nearly 15%, at approximate to 9 mW. At this dissipated power level, the method also revealed a spatial nonuniformity of approximate to +/- 0.8 degrees C across the microcalorimeter. [2020-0173]
Keywords
Calorimetry; microelectromechanical systems; microfabrication; microfluidic; thermal analysis; temperature measurement
Authors
Ni, S.; Zhu, HL.; Neuzil, P.; Yobas, L.
Released
22. 7. 2020
Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Location
PISCATAWAY
ISBN
1057-7157
Periodical
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Year of study
29
Number
5
State
United States of America
Pages from
1103
Pages to
1105
Pages count
3
URL
https://ieeexplore.ieee.org/abstract/document/9146342/?casa_token=RITeHDdpl-4AAAAA:p1k5VLKW-0TfjK4D-CvPPS1bU9MUuyyTdXXScFONtZKEnXqi3vDrLn4HdSngfSMT1saBx7NzUnY
BibTex
@article{BUT165709, author="Ni, S. and Zhu, HL. and Neuzil, P. and Yobas, L.", title="A SiN Microcalorimeter and a Non-Contact Precision Method of Temperature Calibration", journal="JOURNAL OF MICROELECTROMECHANICAL SYSTEMS", year="2020", volume="29", number="5", pages="1103--1105", doi="10.1109/JMEMS.2020.3008867", issn="1057-7157", url="https://ieeexplore.ieee.org/abstract/document/9146342/?casa_token=RITeHDdpl-4AAAAA:p1k5VLKW-0TfjK4D-CvPPS1bU9MUuyyTdXXScFONtZKEnXqi3vDrLn4HdSngfSMT1saBx7NzUnY" }