Detail publikace

A SiN Microcalorimeter and a Non-Contact Precision Method of Temperature Calibration

Ni, S. Zhu, HL. Neuzil, P. Yobas, L.

Originální název

A SiN Microcalorimeter and a Non-Contact Precision Method of Temperature Calibration

Typ

článek v časopise ve Web of Science, Jimp

Jazyk

angličtina

Originální abstrakt

A dual-channel flow-through microcalorimeter device is presented along with a non-contact precision method of temperature calibration. A microfluidic channel with a volume of approximate to 550 pL in a spiral layout was fabricated from low-stress nitride suspended over a cavity in a silicon substrate. The thin-film heater and resistive temperature detector (RTD) on the channel were defined by a patterned Ti layer. The device exhibited a rapid thermal response with the following thermal characteristics: a time constant of approximate to 10.5 ms, a heat conductance of approximate to 152 mu W. K-1 and a heat capacitance of approximate to 1.6 mu J . K-1 on average based on the measurements of nine separate units fabricated on the same wafer. Further, the melting curve analysis (MCA) of a double-stranded DNA was proposed as a non-contact method of microcalorimeter RTD calibration. The method revealed that the measurement by the RTD underestimates the temperature of the channel interior by an amount of nearly 15%, at approximate to 9 mW. At this dissipated power level, the method also revealed a spatial nonuniformity of approximate to +/- 0.8 degrees C across the microcalorimeter. [2020-0173]

Klíčová slova

Calorimetry; microelectromechanical systems; microfabrication; microfluidic; thermal analysis; temperature measurement

Autoři

Ni, S.; Zhu, HL.; Neuzil, P.; Yobas, L.

Vydáno

22. 7. 2020

Nakladatel

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC

Místo

PISCATAWAY

ISSN

1057-7157

Periodikum

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Ročník

29

Číslo

5

Stát

Spojené státy americké

Strany od

1103

Strany do

1105

Strany počet

3

URL

https://ieeexplore.ieee.org/abstract/document/9146342/?casa_token=RITeHDdpl-4AAAAA:p1k5VLKW-0TfjK4D-CvPPS1bU9MUuyyTdXXScFONtZKEnXqi3vDrLn4HdSngfSMT1saBx7NzUnY

BibTex

@article{BUT165709,
  author="Ni, S. and Zhu, HL. and Neuzil, P. and Yobas, L.",
  title="A SiN Microcalorimeter and a Non-Contact Precision Method of Temperature Calibration",
  journal="JOURNAL OF MICROELECTROMECHANICAL SYSTEMS",
  year="2020",
  volume="29",
  number="5",
  pages="1103--1105",
  doi="10.1109/JMEMS.2020.3008867",
  issn="1057-7157",
  url="https://ieeexplore.ieee.org/abstract/document/9146342/?casa_token=RITeHDdpl-4AAAAA:p1k5VLKW-0TfjK4D-CvPPS1bU9MUuyyTdXXScFONtZKEnXqi3vDrLn4HdSngfSMT1saBx7NzUnY"
}