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ZHANG, H. PEKÁREK, J. FENG, J. LIU, X. Li, H. ZHU, H. SVATOŠ, V. GABLECH, I. PODEŠVA, P. NI, S. YOBAS, L. NEUŽIL, P.
Original Title
Nanolithography Toolbox - Simplifying the design complexity of microfluidic chips
Type
journal article in Web of Science
Language
English
Original Abstract
Microfluidic devices typically require complex shapes such as funnels, spirals, splitters, channels with different widths, or customized objects of arbitrary complexity with a smooth transition between these elements. Device layouts are generally designed by software developed for the design of integrated circuits or by general computer-aided design drawing tools. Both methods have their limitations, making these tasks time consuming. Here, a script-based, time-effective method to generate the layout of various microfluidic chips with complex geometries is presented. The present work uses the nanolithography toolbox (NT), a platform-independent software package, which employs parameterized fundamental blocks (cells) to create microscale and nanoscale structures. In order to demonstrate the functionality and efficiency of the NT, a few classical microfluidic devices were designed using the NT and then fabricated in glass/silicon using standard microfabrication techniques and in poly(dimethylsiloxane) using soft lithography as well as more complex techniques used for flow-through calorimetry. In addition, the functionality of a few of the fabricated devices was tested. The powerful method proposed allows the creation of microfluidic devices with complex layouts in an easy way, simplifying the design process and improving design efficiency. Thus, it holds great potential for broad applications in microfluidic device design.
Keywords
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Authors
ZHANG, H.; PEKÁREK, J.; FENG, J.; LIU, X.; Li, H.; ZHU, H.; SVATOŠ, V.; GABLECH, I.; PODEŠVA, P.; NI, S.; YOBAS, L.; NEUŽIL, P.
Released
10. 11. 2020
Publisher
AVS: Science & Technology of Materials, Interfaces, and Processing
Location
USA
ISBN
2166-2746
Periodical
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Year of study
38
Number
6
State
United States of America
Pages from
1
Pages to
8
Pages count
URL
https://avs.scitation.org/doi/pdf/10.1116/6.0000562
BibTex
@article{BUT165959, author="ZHANG, H. and PEKÁREK, J. and FENG, J. and LIU, X. and Li, H. and ZHU, H. and SVATOŠ, V. and GABLECH, I. and PODEŠVA, P. and NI, S. and YOBAS, L. and NEUŽIL, P.", title="Nanolithography Toolbox - Simplifying the design complexity of microfluidic chips", journal="JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B", year="2020", volume="38", number="6", pages="1--8", doi="10.1116/6.0000562", issn="2166-2746", url="https://avs.scitation.org/doi/pdf/10.1116/6.0000562" }