Detail publikace

Nanolithography Toolbox - Simplifying the design complexity of microfluidic chips

ZHANG, H. PEKÁREK, J. FENG, J. LIU, X. Li, H. ZHU, H. SVATOŠ, V. GABLECH, I. PODEŠVA, P. NI, S. YOBAS, L. NEUŽIL, P.

Originální název

Nanolithography Toolbox - Simplifying the design complexity of microfluidic chips

Typ

článek v časopise ve Web of Science, Jimp

Jazyk

angličtina

Originální abstrakt

Microfluidic devices typically require complex shapes such as funnels, spirals, splitters, channels with different widths, or customized objects of arbitrary complexity with a smooth transition between these elements. Device layouts are generally designed by software developed for the design of integrated circuits or by general computer-aided design drawing tools. Both methods have their limitations, making these tasks time consuming. Here, a script-based, time-effective method to generate the layout of various microfluidic chips with complex geometries is presented. The present work uses the nanolithography toolbox (NT), a platform-independent software package, which employs parameterized fundamental blocks (cells) to create microscale and nanoscale structures. In order to demonstrate the functionality and efficiency of the NT, a few classical microfluidic devices were designed using the NT and then fabricated in glass/silicon using standard microfabrication techniques and in poly(dimethylsiloxane) using soft lithography as well as more complex techniques used for flow-through calorimetry. In addition, the functionality of a few of the fabricated devices was tested. The powerful method proposed allows the creation of microfluidic devices with complex layouts in an easy way, simplifying the design process and improving design efficiency. Thus, it holds great potential for broad applications in microfluidic device design.

Klíčová slova

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Autoři

ZHANG, H.; PEKÁREK, J.; FENG, J.; LIU, X.; Li, H.; ZHU, H.; SVATOŠ, V.; GABLECH, I.; PODEŠVA, P.; NI, S.; YOBAS, L.; NEUŽIL, P.

Vydáno

10. 11. 2020

Nakladatel

AVS: Science & Technology of Materials, Interfaces, and Processing

Místo

USA

ISSN

2166-2746

Periodikum

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Ročník

38

Číslo

6

Stát

Spojené státy americké

Strany od

1

Strany do

8

Strany počet

8

URL

https://avs.scitation.org/doi/pdf/10.1116/6.0000562

BibTex

@article{BUT165959,
  author="ZHANG, H. and PEKÁREK, J. and FENG, J. and LIU, X. and Li, H. and ZHU, H. and SVATOŠ, V. and GABLECH, I. and PODEŠVA, P. and NI, S. and YOBAS, L. and NEUŽIL, P.",
  title="Nanolithography Toolbox - Simplifying the design complexity of microfluidic chips",
  journal="JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B",
  year="2020",
  volume="38",
  number="6",
  pages="1--8",
  doi="10.1116/6.0000562",
  issn="2166-2746",
  url="https://avs.scitation.org/doi/pdf/10.1116/6.0000562"
}