Publication detail

How to make full use of surface structure characteristics for evaluation of high precise technologies, when the quality of products is required in the range smaller than one micrometer.

BUMBÁLEK, L.

Original Title

How to make full use of surface structure characteristics for evaluation of high precise technologies, when the quality of products is required in the range smaller than one micrometer.

Type

conference paper

Language

English

Original Abstract

Many thasks in engineering research and development are now linked with the surfaces rather than the bulk of material. From the viewpoint of nanotechnology requirements it is timely to review the state of the art in surface metrology and to use all the possibilities of structure analysis and utilize not only the classical characteristics, but also the characteristics nonconventional.

Keywords

nanotechnology, surface parameters

Authors

BUMBÁLEK, L.

RIV year

2003

Released

21. 10. 2003

Publisher

ČSNMT Praha

Location

Brno

ISBN

80-214-2527-X

Book

International Conference NANO03

Edition number

neuvedeno

Pages from

166

Pages to

171

Pages count

6

BibTex

@inproceedings{BUT16845,
  author="Leoš {Bumbálek}",
  title="How to make full use of surface structure characteristics for evaluation of high precise technologies, when the quality of products is required in the range smaller than one micrometer.",
  booktitle="International Conference NANO03",
  year="2003",
  number="neuvedeno",
  pages="166--171",
  publisher="ČSNMT Praha",
  address="Brno",
  isbn="80-214-2527-X"
}