Detail publikace

How to make full use of surface structure characteristics for evaluation of high precise technologies, when the quality of products is required in the range smaller than one micrometer.

BUMBÁLEK, L.

Originální název

How to make full use of surface structure characteristics for evaluation of high precise technologies, when the quality of products is required in the range smaller than one micrometer.

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

Many thasks in engineering research and development are now linked with the surfaces rather than the bulk of material. From the viewpoint of nanotechnology requirements it is timely to review the state of the art in surface metrology and to use all the possibilities of structure analysis and utilize not only the classical characteristics, but also the characteristics nonconventional.

Klíčová slova

nanotechnology, surface parameters

Autoři

BUMBÁLEK, L.

Rok RIV

2003

Vydáno

21. 10. 2003

Nakladatel

ČSNMT Praha

Místo

Brno

ISBN

80-214-2527-X

Kniha

International Conference NANO03

Číslo edice

neuvedeno

Strany od

166

Strany do

171

Strany počet

6

BibTex

@inproceedings{BUT16845,
  author="Leoš {Bumbálek}",
  title="How to make full use of surface structure characteristics for evaluation of high precise technologies, when the quality of products is required in the range smaller than one micrometer.",
  booktitle="International Conference NANO03",
  year="2003",
  number="neuvedeno",
  pages="166--171",
  publisher="ČSNMT Praha",
  address="Brno",
  isbn="80-214-2527-X"
}