Publication detail

Computation of the Low Voltage BSE Detector

Petr WAndrol, Rudolf Autrata

Original Title

Computation of the Low Voltage BSE Detector

Type

conference paper

Language

English

Original Abstract

The scintillator-photomultiplier detection system installed under the pole piece represents the most efficient BSE detector in SEM. However, the initial energy of the BSEs of 0.5-3 keV in the LV SEM is the energy, on which the light yield of scintillators decreases. Therefore, it is necessary to accelerate the BSEs energy by electrostatic field before they reach the scintillator. By this electrostatic field both BSEs and SEs are accelerated to the scintillator and the image is a mixture of material and topographical contrasts. It is necessary to separate SEs by an energy filter or an immersion magnetic lens for the true material contrast observation.

Keywords

Low voltage SEM, BSE detector

Authors

Petr WAndrol, Rudolf Autrata

RIV year

2005

Released

1. 1. 2005

Publisher

Československá mikroskopická společnost

Pages from

46

Pages to

46

Pages count

1

BibTex

@inproceedings{BUT17772,
  author="Petr {Wandrol} and Rudolf {Autrata}",
  title="Computation of the Low Voltage BSE Detector",
  booktitle="Mikroskopie 2005",
  year="2005",
  number="1",
  pages="1",
  publisher="Československá mikroskopická společnost"
}