Detail publikace

Computation of the Low Voltage BSE Detector

Petr WAndrol, Rudolf Autrata

Originální název

Computation of the Low Voltage BSE Detector

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

The scintillator-photomultiplier detection system installed under the pole piece represents the most efficient BSE detector in SEM. However, the initial energy of the BSEs of 0.5-3 keV in the LV SEM is the energy, on which the light yield of scintillators decreases. Therefore, it is necessary to accelerate the BSEs energy by electrostatic field before they reach the scintillator. By this electrostatic field both BSEs and SEs are accelerated to the scintillator and the image is a mixture of material and topographical contrasts. It is necessary to separate SEs by an energy filter or an immersion magnetic lens for the true material contrast observation.

Klíčová slova

Low voltage SEM, BSE detector

Autoři

Petr WAndrol, Rudolf Autrata

Rok RIV

2005

Vydáno

1. 1. 2005

Nakladatel

Československá mikroskopická společnost

Strany od

46

Strany do

46

Strany počet

1

BibTex

@inproceedings{BUT17772,
  author="Petr {Wandrol} and Rudolf {Autrata}",
  title="Computation of the Low Voltage BSE Detector",
  booktitle="Mikroskopie 2005",
  year="2005",
  number="1",
  pages="1",
  publisher="Československá mikroskopická společnost"
}