Publication detail

LITESCOPE (TM) AFM-IN-SEM: ADVANCED TOOL FOR CORRELATIVE IMAGING AND SURFACE CHARACTERIZATION

NEUMAN, J. NOVÁČEK, Z. NOVOTNÁ, V. HEGROVÁ, V. FLAJŠMAN, L.

Original Title

LITESCOPE (TM) AFM-IN-SEM: ADVANCED TOOL FOR CORRELATIVE IMAGING AND SURFACE CHARACTERIZATION

Type

conference paper

Language

English

Original Abstract

Atomic force microscope (AFM) LiteScope (TM) produced by NenoVision is carefully designed for direct integration into many different types of scanning electron microscopes (SEM). It is equipped with unique technology for true correlative imaging - Correlative Probe and Electron Microscopy (TM) (CPEM). It allows simultaneous measurement of various signals of SEM, AFM and other related techniques like Electron Beam Induced Current (EBIC) or Catodoluminiscence (CL). LiteScope also enables using other methods such as Focused Ion Beam (FIB), Gas Injection System (GIS) or Electron Dispersive X-ray (EDX) to modify and right away analyze the sample surface. Among the main applications belong e.g. 3D surface characterization, height/depth profiling, surface roughness calculation, precise tip navigation, nanoindentation and nanomanipulation, variety of spectroscopic regimes, measurement of electrical and mechanical sample properties, etc.

Keywords

Correlative Probe and Electron Microscopy (CPEM); Atomic Force Microscopy (AFM); Scanning Electron Microscopy (SEM); Focused Ion Beam (FIB)

Authors

NEUMAN, J.; NOVÁČEK, Z.; NOVOTNÁ, V.; HEGROVÁ, V.; FLAJŠMAN, L.

Released

16. 10. 2019

Publisher

TANGER LTD

Location

SLEZSKA

ISBN

2694-930X

Periodical

Proceedings 12th International Conference on Nanomaterials - Research & Application

State

Czech Republic

Pages from

568

Pages to

572

Pages count

5

BibTex

@inproceedings{BUT182244,
  author="Jan {Neuman} and Zdeněk {Nováček} and Veronika {Novotná} and Veronika {Hegrová} and Lukáš {Flajšman}",
  title="LITESCOPE (TM) AFM-IN-SEM: ADVANCED TOOL FOR CORRELATIVE IMAGING AND SURFACE CHARACTERIZATION",
  booktitle="11TH INTERNATIONAL CONFERENCE ON NANOMATERIALS - RESEARCH & APPLICATION (NANOCON 2019)",
  year="2019",
  journal="Proceedings 12th International Conference on Nanomaterials - Research & Application",
  pages="568--572",
  publisher="TANGER LTD",
  address="SLEZSKA",
  doi="10.37904/nanocon.2019.8655",
  issn="2694-930X"
}