Detail publikace

LITESCOPE (TM) AFM-IN-SEM: ADVANCED TOOL FOR CORRELATIVE IMAGING AND SURFACE CHARACTERIZATION

NEUMAN, J. NOVÁČEK, Z. NOVOTNÁ, V. HEGROVÁ, V. FLAJŠMAN, L.

Originální název

LITESCOPE (TM) AFM-IN-SEM: ADVANCED TOOL FOR CORRELATIVE IMAGING AND SURFACE CHARACTERIZATION

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

Atomic force microscope (AFM) LiteScope (TM) produced by NenoVision is carefully designed for direct integration into many different types of scanning electron microscopes (SEM). It is equipped with unique technology for true correlative imaging - Correlative Probe and Electron Microscopy (TM) (CPEM). It allows simultaneous measurement of various signals of SEM, AFM and other related techniques like Electron Beam Induced Current (EBIC) or Catodoluminiscence (CL). LiteScope also enables using other methods such as Focused Ion Beam (FIB), Gas Injection System (GIS) or Electron Dispersive X-ray (EDX) to modify and right away analyze the sample surface. Among the main applications belong e.g. 3D surface characterization, height/depth profiling, surface roughness calculation, precise tip navigation, nanoindentation and nanomanipulation, variety of spectroscopic regimes, measurement of electrical and mechanical sample properties, etc.

Klíčová slova

Correlative Probe and Electron Microscopy (CPEM); Atomic Force Microscopy (AFM); Scanning Electron Microscopy (SEM); Focused Ion Beam (FIB)

Autoři

NEUMAN, J.; NOVÁČEK, Z.; NOVOTNÁ, V.; HEGROVÁ, V.; FLAJŠMAN, L.

Vydáno

16. 10. 2019

Nakladatel

TANGER LTD

Místo

SLEZSKA

ISSN

2694-930X

Periodikum

Proceedings 12th International Conference on Nanomaterials - Research & Application

Stát

Česká republika

Strany od

568

Strany do

572

Strany počet

5

BibTex

@inproceedings{BUT182244,
  author="Jan {Neuman} and Zdeněk {Nováček} and Veronika {Novotná} and Veronika {Hegrová} and Lukáš {Flajšman}",
  title="LITESCOPE (TM) AFM-IN-SEM: ADVANCED TOOL FOR CORRELATIVE IMAGING AND SURFACE CHARACTERIZATION",
  booktitle="11TH INTERNATIONAL CONFERENCE ON NANOMATERIALS - RESEARCH & APPLICATION (NANOCON 2019)",
  year="2019",
  journal="Proceedings 12th International Conference on Nanomaterials - Research & Application",
  pages="568--572",
  publisher="TANGER LTD",
  address="SLEZSKA",
  doi="10.37904/nanocon.2019.8655",
  issn="2694-930X"
}