Publication detail

Potentialities of optical profilometer MicroProf FRT for surface quality measurement

PÁLENÍKOVÁ, K. OHLÍDAL, M.

Original Title

Potentialities of optical profilometer MicroProf FRT for surface quality measurement

Type

conference paper

Language

English

Original Abstract

Principle, parameters and selected applications of the optical profilometer MicroProf FRT are presented.

Keywords

Optical metrology, surface quality

Authors

PÁLENÍKOVÁ, K.; OHLÍDAL, M.

RIV year

2005

Released

1. 7. 2005

Publisher

SPIE - The internationalSociety for Optical Engineering

Location

Bellingham, Washington, USA

ISBN

0-8194-5951-8

Book

14 th Slovak-Czech Polish Conference on Wave and Quantum Aspects of Contemporary Optics

ISBN

0277-786X

Periodical

Proceedings of SPIE

Year of study

5945

State

United States of America

Pages from

59451O-1

Pages to

59451O-6

Pages count

6