Publication detail

Metal thin films in sulfur hexafluoride decomposition products

VRBICKÝ, J.

Original Title

Metal thin films in sulfur hexafluoride decomposition products

Type

conference paper

Language

English

Original Abstract

This article describes conductivity of metal thin films dependence on concentration of sulfur hexafluoride decomposition products. The sulfur hexafluoride was decomposed by electrical sparks.

Keywords

Sulfur hexafluoride, thin film coating, decomposition products

Authors

VRBICKÝ, J.

RIV year

2007

Released

29. 1. 2007

Publisher

Brno University of Technology, Faculty of Elactrical Engineering and Communication

Location

Brno

ISBN

978-80-214-3410-3

Book

Student EEICT 2007

Edition number

1

Pages from

131

Pages to

133

Pages count

3

BibTex

@inproceedings{BUT23157,
  author="Jiří {Vrbický}",
  title="Metal thin films in sulfur hexafluoride decomposition products",
  booktitle="Student EEICT 2007",
  year="2007",
  number="1",
  pages="131--133",
  publisher="Brno University of Technology, Faculty of Elactrical Engineering and Communication",
  address="Brno",
  isbn="978-80-214-3410-3"
}