Detail publikace

Metal thin films in sulfur hexafluoride decomposition products

VRBICKÝ, J.

Originální název

Metal thin films in sulfur hexafluoride decomposition products

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

This article describes conductivity of metal thin films dependence on concentration of sulfur hexafluoride decomposition products. The sulfur hexafluoride was decomposed by electrical sparks.

Klíčová slova

Sulfur hexafluoride, thin film coating, decomposition products

Autoři

VRBICKÝ, J.

Rok RIV

2007

Vydáno

29. 1. 2007

Nakladatel

Brno University of Technology, Faculty of Elactrical Engineering and Communication

Místo

Brno

ISBN

978-80-214-3410-3

Kniha

Student EEICT 2007

Číslo edice

1

Strany od

131

Strany do

133

Strany počet

3

BibTex

@inproceedings{BUT23157,
  author="Jiří {Vrbický}",
  title="Metal thin films in sulfur hexafluoride decomposition products",
  booktitle="Student EEICT 2007",
  year="2007",
  number="1",
  pages="131--133",
  publisher="Brno University of Technology, Faculty of Elactrical Engineering and Communication",
  address="Brno",
  isbn="978-80-214-3410-3"
}