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Publication detail
FICEK, R. VRBA, R.
Original Title
Carbon Nanotubes Applicated in Pressure Measurement
Type
conference paper
Language
English
Original Abstract
Novel pressure sensors have been achieved utilizing carbon nanotubes (CNTs) arrays as the electron source in emission sensor or as the surface increase element in capacitance sensor. Both sensors consisted of the elastic electrode-sensing film fabricated by wet anisotropic etching process and solid electrode. The emission sensor has elastic anode electrode with membrane and multi-wall carbon nanotubes (MWCNTs) arrays cathode in the vacuum chamber. The capacitance sensor has the same topology extensive by CNT on both electrodes without vacuum chamber. The MWCNTs were grown by plasma enhanced chemical vapour deposition (PECVD).
Keywords
Carbon Nanotubes, Sensor, MEMS
Authors
FICEK, R.; VRBA, R.
RIV year
2007
Released
26. 4. 2007
Publisher
Vysoké učení technické v Brně, Fakulta elektrotechniky a komunikačních technologií a Fakulta informačních technologií
Location
Brno
ISBN
978-80-214-3410-3
Book
Proceedings of the 13th Conference STUDENT EEICT 2007
Edition number
první
Pages from
295
Pages to
298
Pages count
4
BibTex
@inproceedings{BUT23640, author="Richard {Ficek} and Radimír {Vrba}", title="Carbon Nanotubes Applicated in Pressure Measurement", booktitle="Proceedings of the 13th Conference STUDENT EEICT 2007", year="2007", number="první", pages="4", publisher="Vysoké učení technické v Brně, Fakulta elektrotechniky a komunikačních technologií a Fakulta informačních technologií", address="Brno", isbn="978-80-214-3410-3" }