Publication detail

Optical constants of plasma-polymerized tetravinylsilane films

ČECHALOVÁ, B. STUDÝNKA, J. ČECH, V.

Original Title

Optical constants of plasma-polymerized tetravinylsilane films

Type

conference paper

Language

English

Original Abstract

We have focused on the optical properties of thin plasma-polymerized films deposited from a mixture of tetravinylsilane and oxygen gas and evaluated by means of spectroscopic ellipsometry. The RF effective power of pulsed plasma and the oxygen/total flow rate ratio were varied in broad range. We found a clear link between the RF effective power used and optical properties (refractive index, extinction coefficient, band gap) of the films.

Keywords

plasma polymerization, optical properties, ellipsometry

Authors

ČECHALOVÁ, B.; STUDÝNKA, J.; ČECH, V.

RIV year

2007

Released

13. 12. 2007

ISBN

978-4-9903773-2-8

Book

18th International Symposium on Plasma Chemistry

Pages from

1

Pages to

4

Pages count

4

BibTex

@inproceedings{BUT28338,
  author="Božena {Čechalová} and Jan {Studýnka} and Vladimír {Čech}",
  title="Optical constants of plasma-polymerized tetravinylsilane films",
  booktitle="18th International Symposium on Plasma Chemistry",
  year="2007",
  pages="1--4",
  isbn="978-4-9903773-2-8"
}