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ČECHALOVÁ, B. STUDÝNKA, J. ČECH, V.
Original Title
Optical constants of plasma-polymerized tetravinylsilane films
Type
conference paper
Language
English
Original Abstract
We have focused on the optical properties of thin plasma-polymerized films deposited from a mixture of tetravinylsilane and oxygen gas and evaluated by means of spectroscopic ellipsometry. The RF effective power of pulsed plasma and the oxygen/total flow rate ratio were varied in broad range. We found a clear link between the RF effective power used and optical properties (refractive index, extinction coefficient, band gap) of the films.
Keywords
plasma polymerization, optical properties, ellipsometry
Authors
ČECHALOVÁ, B.; STUDÝNKA, J.; ČECH, V.
RIV year
2007
Released
13. 12. 2007
ISBN
978-4-9903773-2-8
Book
18th International Symposium on Plasma Chemistry
Pages from
1
Pages to
4
Pages count
BibTex
@inproceedings{BUT28338, author="Božena {Čechalová} and Jan {Studýnka} and Vladimír {Čech}", title="Optical constants of plasma-polymerized tetravinylsilane films", booktitle="18th International Symposium on Plasma Chemistry", year="2007", pages="1--4", isbn="978-4-9903773-2-8" }