Publication detail

PRECISE MEASUREMENT OF THICKNESS DISTRIBUTION OF NON-UNIFORM THIN FILMS BY IMAGING SPECTROSCOPIC REFLECTOMETRY

OHLÍDAL, M. OHLÍDAL, I. KLAPETEK, P. NEČAS, D.

Original Title

PRECISE MEASUREMENT OF THICKNESS DISTRIBUTION OF NON-UNIFORM THIN FILMS BY IMAGING SPECTROSCOPIC REFLECTOMETRY

Type

conference paper

Language

English

Original Abstract

A new method of imaging spectroscopic photometry enabling us to perform the complete optical characterization of thin films exhibiting area non-uniformity in optical parameters is presented. An original imaging spectroscopic photometer operating in the reflection mode at normal incidence is used to apply this method. The method described was used to characterize carbon-nitride thin films.

Keywords

non-uniform thin films, imaging spectroscopic reflectometry

Authors

OHLÍDAL, M.; OHLÍDAL, I.; KLAPETEK, P.; NEČAS, D.

RIV year

2009

Released

11. 9. 2009

Publisher

IMEKO

Location

Lisabon

ISBN

978-963-88410-0-1

Book

Proceedings of IMEKO 2009

Pages from

100

Pages to

105

Pages count

6

BibTex

@inproceedings{BUT32157,
  author="Miloslav {Ohlídal} and Ivan {Ohlídal} and Petr {Klapetek} and David {Nečas}",
  title="PRECISE MEASUREMENT OF THICKNESS DISTRIBUTION OF NON-UNIFORM THIN FILMS BY IMAGING SPECTROSCOPIC REFLECTOMETRY",
  booktitle="Proceedings of IMEKO 2009",
  year="2009",
  pages="100--105",
  publisher="IMEKO",
  address="Lisabon",
  isbn="978-963-88410-0-1"
}