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OHLÍDAL, M. OHLÍDAL, I. KLAPETEK, P. NEČAS, D.
Original Title
PRECISE MEASUREMENT OF THICKNESS DISTRIBUTION OF NON-UNIFORM THIN FILMS BY IMAGING SPECTROSCOPIC REFLECTOMETRY
Type
conference paper
Language
English
Original Abstract
A new method of imaging spectroscopic photometry enabling us to perform the complete optical characterization of thin films exhibiting area non-uniformity in optical parameters is presented. An original imaging spectroscopic photometer operating in the reflection mode at normal incidence is used to apply this method. The method described was used to characterize carbon-nitride thin films.
Keywords
non-uniform thin films, imaging spectroscopic reflectometry
Authors
OHLÍDAL, M.; OHLÍDAL, I.; KLAPETEK, P.; NEČAS, D.
RIV year
2009
Released
11. 9. 2009
Publisher
IMEKO
Location
Lisabon
ISBN
978-963-88410-0-1
Book
Proceedings of IMEKO 2009
Pages from
100
Pages to
105
Pages count
6
BibTex
@inproceedings{BUT32157, author="Miloslav {Ohlídal} and Ivan {Ohlídal} and Petr {Klapetek} and David {Nečas}", title="PRECISE MEASUREMENT OF THICKNESS DISTRIBUTION OF NON-UNIFORM THIN FILMS BY IMAGING SPECTROSCOPIC REFLECTOMETRY", booktitle="Proceedings of IMEKO 2009", year="2009", pages="100--105", publisher="IMEKO", address="Lisabon", isbn="978-963-88410-0-1" }