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URBÁNEK, M., ŠIKOLA, T., NEBOJSA, A., SPOUSTA, J., DITTRICHOVÁ, L., CHMELÍK, R., ZLÁMAL, J., JIRUŠE, J.
Original Title
Monitoring of surface homogeneity of optical parameters of thin films.
Type
conference paper
Language
English
Original Abstract
Monitoring of surface homogeneity of optical parameters of thin films
Key words in English
thin films
Authors
RIV year
2001
Released
17. 4. 2000
Publisher
Editors: B. Michel, T. Winkler, M. Werner,H. Fecht
Location
Berlin
Pages from
604
Pages to
609
Pages count
6
BibTex
@inproceedings{BUT4155, author="Michal {Urbánek} and Tomáš {Šikola} and Alois {Nebojsa} and Jiří {Spousta} and Libuše {Dittrichová} and Radim {Chmelík} and Jakub {Zlámal} and Jaroslav {Jiruše}", title="Monitoring of surface homogeneity of optical parameters of thin films.", booktitle="Micromat 2000", year="2000", pages="6", publisher="Editors: B. Michel, T. Winkler, M. Werner,H. Fecht", address="Berlin" }