Publication detail

Correlation of thermal stability of the mechanical and optical properties of diamond-like carbon films

FRANTA, D. BURŠÍKOVÁ, V. OHLÍDAL, I. ŠŤAHEL, P. OHLÍDAL, M. NEČAS, D.

Original Title

Correlation of thermal stability of the mechanical and optical properties of diamond-like carbon films

Type

journal article - other

Language

English

Original Abstract

The study of the influence of the annealing on the mechanical and optical properties of the plasma deposited DLC films is performed. The DLC films were prepared for different values of hydrogen content from the mixture of methan and hydrogen in PECVD reactor. The optical properties of aforementioned DLC films were studied ex-situ using variable angle spectroscopic ellipsometry and spectroscopic reflectometry applied within the near-UV, visible and near-IR regions. For optical constants determination our dispersion model based on parametrization of the densities of electronic states was used. The dependence of the hardness and elastic modulus on the hydrogen content in the deposition feed was determined using depth sensing indentation technique.The connection between the hardness and elastic modulus on the one hand and optical constants on the other hand was shown. The annealing of the DLC films strongly changed their mechanical, optical and electrical properties.

Keywords

Thermal stability, Optical constants, Electronic structure, Free-carrier anisotropy

Authors

FRANTA, D.; BURŠÍKOVÁ, V.; OHLÍDAL, I.; ŠŤAHEL, P.; OHLÍDAL, M.; NEČAS, D.

RIV year

2007

Released

10. 6. 2007

Publisher

Elsevier

Location

Amsterdam

ISBN

0925-9635

Periodical

Diamond and Related Materials

Year of study

16

Number

4-7

State

Kingdom of the Netherlands

Pages from

1331

Pages to

1335

Pages count

5

BibTex

@article{BUT43840,
  author="Daniel {Franta} and Vilma {Buršíková} and Ivan {Ohlídal} and Pavel {Šťahel} and Miloslav {Ohlídal} and David {Nečas}",
  title="Correlation of thermal stability of the mechanical and optical properties of diamond-like carbon films",
  journal="Diamond and Related Materials",
  year="2007",
  volume="16",
  number="4-7",
  pages="1331--1335",
  issn="0925-9635"
}