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FRANTA, D. BURŠÍKOVÁ, V. OHLÍDAL, I. ŠŤAHEL, P. OHLÍDAL, M. NEČAS, D.
Originální název
Correlation of thermal stability of the mechanical and optical properties of diamond-like carbon films
Typ
článek v časopise - ostatní, Jost
Jazyk
angličtina
Originální abstrakt
The study of the influence of the annealing on the mechanical and optical properties of the plasma deposited DLC films is performed. The DLC films were prepared for different values of hydrogen content from the mixture of methan and hydrogen in PECVD reactor. The optical properties of aforementioned DLC films were studied ex-situ using variable angle spectroscopic ellipsometry and spectroscopic reflectometry applied within the near-UV, visible and near-IR regions. For optical constants determination our dispersion model based on parametrization of the densities of electronic states was used. The dependence of the hardness and elastic modulus on the hydrogen content in the deposition feed was determined using depth sensing indentation technique.The connection between the hardness and elastic modulus on the one hand and optical constants on the other hand was shown. The annealing of the DLC films strongly changed their mechanical, optical and electrical properties.
Klíčová slova
Thermal stability, Optical constants, Electronic structure, Free-carrier anisotropy
Autoři
FRANTA, D.; BURŠÍKOVÁ, V.; OHLÍDAL, I.; ŠŤAHEL, P.; OHLÍDAL, M.; NEČAS, D.
Rok RIV
2007
Vydáno
10. 6. 2007
Nakladatel
Elsevier
Místo
Amsterdam
ISSN
0925-9635
Periodikum
Diamond and Related Materials
Ročník
16
Číslo
4-7
Stát
Nizozemsko
Strany od
1331
Strany do
1335
Strany počet
5
BibTex
@article{BUT43840, author="Daniel {Franta} and Vilma {Buršíková} and Ivan {Ohlídal} and Pavel {Šťahel} and Miloslav {Ohlídal} and David {Nečas}", title="Correlation of thermal stability of the mechanical and optical properties of diamond-like carbon films", journal="Diamond and Related Materials", year="2007", volume="16", number="4-7", pages="1331--1335", issn="0925-9635" }