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AUTRATA, R., JIRÁK, J., ŠPINKA, J.
Original Title
X-RAY MICROANALYSIS IN ESEM AND LV SEM
Type
conference paper
Language
English
Original Abstract
This article presents the advantageous metod for the X-ray microanalysis in ESEM which enables to assess the true specimen composition via mesurement of 4 or 5 values of the counts per second for different pressures.
Key words in English
X-ray microanalysis, ESEM, LV SEM,
Authors
RIV year
2002
Released
8. 7. 2002
Publisher
Institute of Scientific Instruments Academy of Sciences of the Czech republic, Czechoslovak Microscopy Society
Location
Czech republic, Brno
ISBN
80-238-8986-9
Book
Recent Trends in Charged Particle Optics and Surface Physics Instrumentation
Pages from
49
Pages to
50
Pages count
2
BibTex
@inproceedings{BUT5198, author="Rudolf {Autrata} and Josef {Jirák} and Jiří {Špinka}", title="X-RAY MICROANALYSIS IN ESEM AND LV SEM", booktitle="Recent Trends in Charged Particle Optics and Surface Physics Instrumentation", year="2002", pages="2", publisher="Institute of Scientific Instruments Academy of Sciences of the Czech republic, Czechoslovak Microscopy Society ", address="Czech republic, Brno", isbn="80-238-8986-9" }