Publication detail

Characterization of pp-TVS films by spectroscopic ellipsometry

ČECHALOVÁ, B. STUDÝNKA, J. ČECH, V.

Original Title

Characterization of pp-TVS films by spectroscopic ellipsometry

Type

presentation

Language

English

Original Abstract

We have focused on characterization of plasma polymer films using spectroscopic ellipsometry in this work. The determination of dispersion curves of the refractive index and extinction coefficient for films deposited at different process parameters has been the primary aim of our study.

Keywords

ellipsometry thin film plasma polymerization

Authors

ČECHALOVÁ, B.; STUDÝNKA, J.; ČECH, V.

Released

28. 11. 2006

Location

Berlin

ISBN

3000187510

Edition

BAM

Edition number

2006

URL

http://www.ake.bam.de/workshop-ellipsometry-2006/index.html

BibTex

@misc{BUT63475,
  author="Božena {Čechalová} and Jan {Studýnka} and Vladimír {Čech}",
  title="Characterization of pp-TVS films by spectroscopic ellipsometry",
  year="2006",
  series="BAM",
  edition="2006",
  address="Berlin",
  isbn="3000187510",
  url="http://www.ake.bam.de/workshop-ellipsometry-2006/index.html",
  note="presentation"
}