Publication detail

AUGER ELECTRON SPECTRO-MICROSCOPY

HRNČIŘÍK, P.

Original Title

AUGER ELECTRON SPECTRO-MICROSCOPY

Type

conference paper

Language

English

Original Abstract

The short escape depth of Auger electrons, the high lateral resolution, the chemical information about superficial elemental composition and the possibility of measuring the in-depth distribution of elements (with utilization of the ion sputtering) are the main advantages of the Auger electron spectroscopy (AES). When combined with the scanning electron microscope, AES can provide with image signal suitable for spectro-micrographs showing distribution of elements over the surface, i.e. the chemical mapping. This mapping can be advantageously compared with other SEM image signals in order to facilitate their interpretation.

Key words in English

Auger electrons, Auger electron analyser, signal intensity of an Auger transition

Authors

HRNČIŘÍK, P.

Released

1. 1. 2003

Publisher

Ing.Zdeněk Novotný CSc., Ondráčkova 105, Brno

Location

Brno

ISBN

80-214-2379-X

Book

Proceedings of 9th conference and competition Student EEICT 2003

Pages from

450

Pages to

454

Pages count

5

BibTex

@inproceedings{BUT7278,
  author="Petr {Hrnčiřík}",
  title="AUGER ELECTRON SPECTRO-MICROSCOPY",
  booktitle="Proceedings of 9th conference and competition Student EEICT 2003",
  year="2003",
  pages="5",
  publisher="Ing.Zdeněk Novotný CSc., Ondráčkova 105, Brno",
  address="Brno",
  isbn="80-214-2379-X"
}