Publication detail

Investigation of structure of ceramic targets for nanolayers synthesis by sublimation

MAGAMEDOVA, E. BILALOV, B. SOBOLA, D. EUBOV, S.

Original Title

Investigation of structure of ceramic targets for nanolayers synthesis by sublimation

English Title

Investigation of structure of ceramic targets for nanolayers synthesis by sublimation

Type

journal article - other

Language

Russian

Original Abstract

This work presents the main features of formation technology of ceramic materials in use like targets for nanolayers obtaining by sublimation. The targets structure is investigated by scanning electron microscopy.

English abstract

This work presents the main features of formation technology of ceramic materials in use like targets for nanolayers obtaining by sublimation. The targets structure is investigated by scanning electron microscopy.

Keywords

silicon carbide, aluminum nitride, sublimation, solid solution, epitaxy, target.

Key words in English

silicon carbide, aluminum nitride, sublimation, solid solution, epitaxy, target.

Authors

MAGAMEDOVA, E.; BILALOV, B.; SOBOLA, D.; EUBOV, S.

Released

30. 10. 2010

Publisher

PI FS 77-39604

Location

Krasnoyarsk

ISBN

2072-0831

Periodical

In the World of Scientific Discoveries

Year of study

2010

Number

6.1

State

Russian Federation

Pages from

187

Pages to

188

Pages count

2

BibTex

@article{BUT76517,
  author="Egana {Magamedova} and Bilal {Bilalov} and Dinara {Sobola} and Samur {Eubov}",
  title="Investigation of structure of ceramic targets for nanolayers synthesis by sublimation",
  journal="In the World of Scientific Discoveries",
  year="2010",
  volume="2010",
  number="6.1",
  pages="187--188",
  issn="2072-0831"
}