Detail publikace

Investigation of structure of ceramic targets for nanolayers synthesis by sublimation

MAGAMEDOVA, E. BILALOV, B. SOBOLA, D. EUBOV, S.

Originální název

Investigation of structure of ceramic targets for nanolayers synthesis by sublimation

Anglický název

Výzkum struktur keramických terčíků pro syntézu nanovrstev sublimací

Typ

článek v časopise - ostatní, Jost

Jazyk

ruština

Originální abstrakt

This work presents the main features of formation technology of ceramic materials in use like targets for nanolayers obtaining by sublimation. The targets structure is investigated by scanning electron microscopy.

Anglický abstrakt

This work presents the main features of formation technology of ceramic materials in use like targets for nanolayers obtaining by sublimation. The targets structure is investigated by scanning electron microscopy.

Klíčová slova

silicon carbide, aluminum nitride, sublimation, solid solution, epitaxy, target.

Klíčová slova v angličtině

silicon carbide, aluminum nitride, sublimation, solid solution, epitaxy, target.

Autoři

MAGAMEDOVA, E.; BILALOV, B.; SOBOLA, D.; EUBOV, S.

Vydáno

30. 10. 2010

Nakladatel

PI FS 77-39604

Místo

Krasnoyarsk

ISSN

2072-0831

Periodikum

In the World of Scientific Discoveries

Ročník

2010

Číslo

6.1

Stát

Ruská federace

Strany od

187

Strany do

188

Strany počet

2

BibTex

@article{BUT76517,
  author="Egana {Magamedova} and Bilal {Bilalov} and Dinara {Sobola} and Samur {Eubov}",
  title="Investigation of structure of ceramic targets for nanolayers synthesis by sublimation",
  journal="In the World of Scientific Discoveries",
  year="2010",
  volume="2010",
  number="6.1",
  pages="187--188",
  issn="2072-0831"
}