Publication detail

Methods Used to Determine Exposition Curve for Diffractive Relief

DANĚK, L.

Original Title

Methods Used to Determine Exposition Curve for Diffractive Relief

Type

conference paper

Language

English

Original Abstract

This paper is focused on methods used to measure data for determination of exposition curve, assigns rules of exact measurement, describes limitations of used measurement methods, and suggests new pattern satisfying assigned rules.

Keywords

exposition curve, electron-beam lithography

Authors

DANĚK, L.

Released

1. 1. 2003

Location

Brno

ISBN

80-214-2379-X

Book

PROCEEDINGS OF 9th CONFERENCE AND COMPETITION STUDENT EEICT 2003 Volume 3

Edition number

1.

Pages from

422

Pages to

424

Pages count

3

URL

http://www.feec.vutbr.cz

BibTex

@inproceedings{BUT7700,
  author="Lukáš {Daněk}",
  title="Methods Used to Determine Exposition Curve for Diffractive Relief",
  booktitle="PROCEEDINGS OF 9th CONFERENCE AND COMPETITION STUDENT EEICT 2003 Volume 3",
  year="2003",
  number="1.",
  pages="3",
  address="Brno",
  isbn="80-214-2379-X",
  url="http://www.feec.vutbr.cz"
}