Publication detail

Sputtered and screen-printed metal oxide-based integrated microsensor arrays for the quantitative analysis of gas mixtures

IVANOV, P., LLOBET, E., HUBÁLEK, J., MALYSZ, K., CORREIG, X.

Original Title

Sputtered and screen-printed metal oxide-based integrated microsensor arrays for the quantitative analysis of gas mixtures

Type

conference paper

Language

English

Original Abstract

Either by screen-printing or sputtering, sensitive layers of nanoparticle tin oxide were deposited on silicon micromachined substrates. The procedures allow the deposition of sensing layers before membranes have been etched, which leads to gas micro-sensors with an exellent fabrication yield. The sensors response to ethanol, acetone and ammonia vapours and their binary mixtures was studied.

Keywords

gas sensors, r.f. sputtering, screen-printing, micromachined array, quantitative gas analysis

Authors

IVANOV, P., LLOBET, E., HUBÁLEK, J., MALYSZ, K., CORREIG, X.

RIV year

2003

Released

9. 9. 2003

Publisher

Ing. Zdeněk Novotný CSc.

Location

Brno

ISBN

80-214-2452-4

Book

10th Electronic devices and Systems Conference 2003

Pages from

354

Pages to

357

Pages count

4

BibTex

@inproceedings{BUT8024,
  author="Peter {Ivanov} and Eduard {Llobet} and Jaromír {Hubálek} and Karel {Malysz} and Xavier {Correig}",
  title="Sputtered and screen-printed metal oxide-based integrated microsensor arrays for the quantitative analysis of gas mixtures",
  booktitle="10th Electronic devices and Systems Conference 2003",
  year="2003",
  pages="4",
  publisher="Ing. Zdeněk Novotný CSc.",
  address="Brno",
  isbn="80-214-2452-4"
}