Přístupnostní navigace
E-přihláška
Vyhledávání Vyhledat Zavřít
Detail publikace
IVANOV, P., LLOBET, E., HUBÁLEK, J., MALYSZ, K., CORREIG, X.
Originální název
Sputtered and screen-printed metal oxide-based integrated microsensor arrays for the quantitative analysis of gas mixtures
Typ
článek ve sborníku ve WoS nebo Scopus
Jazyk
angličtina
Originální abstrakt
Either by screen-printing or sputtering, sensitive layers of nanoparticle tin oxide were deposited on silicon micromachined substrates. The procedures allow the deposition of sensing layers before membranes have been etched, which leads to gas micro-sensors with an exellent fabrication yield. The sensors response to ethanol, acetone and ammonia vapours and their binary mixtures was studied.
Klíčová slova
gas sensors, r.f. sputtering, screen-printing, micromachined array, quantitative gas analysis
Autoři
Rok RIV
2003
Vydáno
9. 9. 2003
Nakladatel
Ing. Zdeněk Novotný CSc.
Místo
Brno
ISBN
80-214-2452-4
Kniha
10th Electronic devices and Systems Conference 2003
Strany od
354
Strany do
357
Strany počet
4
BibTex
@inproceedings{BUT8024, author="Peter {Ivanov} and Eduard {Llobet} and Jaromír {Hubálek} and Karel {Malysz} and Xavier {Correig}", title="Sputtered and screen-printed metal oxide-based integrated microsensor arrays for the quantitative analysis of gas mixtures", booktitle="10th Electronic devices and Systems Conference 2003", year="2003", pages="4", publisher="Ing. Zdeněk Novotný CSc.", address="Brno", isbn="80-214-2452-4" }