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ČECH, V. TRIVEDI, R. ŠKODA, D.
Original Title
Mechanical properties of individual layers in a-SiC:H multilayer film
Type
journal article - other
Language
English
Original Abstract
Hydrogenated amorphous carbon-silicon (a-SiC:H) multilayer film consisting of five soft bilayers (layer A: E=15.4 GPa, H=1.69 GPa; layer B: E=9.63 GPa, H=0.94 GPa) was deposited from tetravinylsilane monomer at two RF powers (10 W, 0.1 W) on silicon wafer by plasma-enhanced chemical vapor deposition. The multilayer comprising ten layers of 0.13-micron thickness was sectioned at a shallow angle of 4 deg by ultramicrotomy to reveal the individual layers. The layers in the multilayer film were distinguished by the surface topography mode of semicontact atomic force microscopy utilizing the step character in height corresponding to the stiffness of the individual layers and by atomic force acoustic microscopy (AFAM) utilizing the distribution of resonant frequencies corresponding to elastic anisotropy. The sectioned individual layers were sufficiently smooth (RMS roughness: 0.001 micron) to make nanoindentation measurements for each layer. The Youngs modulus E and hardness H were determined for individual layers, enabling us to distinguish a stiffer layer A from a more pliant layer B. An influence of the surrounding layers and substrate on the determined mechanical constants was discussed as well.
Keywords
atomic force microscopy (AFM); mechanical properties; multilayers; nanoindentation; plasma-enhanced chemical vapor deposition (PECVD)
Authors
ČECH, V.; TRIVEDI, R.; ŠKODA, D.
RIV year
2011
Released
31. 12. 2011
ISBN
1612-8850
Periodical
Plasma Processes and Polymers
Year of study
8
Number
12
State
Federal Republic of Germany
Pages from
1107
Pages to
1115
Pages count
9
BibTex
@article{BUT89431, author="Vladimír {Čech} and Rutul Rajendra {Trivedi} and David {Škoda}", title="Mechanical properties of individual layers in a-SiC:H multilayer film", journal="Plasma Processes and Polymers", year="2011", volume="8", number="12", pages="1107--1115", issn="1612-8850" }