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SVATOŠ, V. MÁRIK, M. PEKÁREK, J. HRDÝ, R. CHOMOUCKÁ, J. HUBÁLEK, J.
Original Title
Design and fabrication of MEMS low power heating membrane
Type
conference paper
Language
English
Original Abstract
The aim of this work is design and fabrication of micro hotplates. This type of device is often used for gas-sensing applications. The main goal is to produce the structure of the heating membrane. Two types of membranes are discussed – suspended and close type of the membrane. The sample which is going to be produced will be a membrane with the size of 1 mm2, to ensure a suitable fabrication technology and the applicable design of the micro-hotplate. The micro hotplates power consumption has to be up to 100 mW at the operating temperature 480 C.
Keywords
microhotplate, gas sensor, membrane
Authors
SVATOŠ, V.; MÁRIK, M.; PEKÁREK, J.; HRDÝ, R.; CHOMOUCKÁ, J.; HUBÁLEK, J.
RIV year
2012
Released
30. 5. 2012
Publisher
Mendelova univerzita v Brně
Location
Brno
ISBN
978-80-7375-618-5
Book
XII. Pracovní setkání fyzikálních chemiků a elektrochemiků
Edition number
1.
Pages from
303
Pages to
304
Pages count
2
BibTex
@inproceedings{BUT92581, author="Vojtěch {Svatoš} and Marian {Márik} and Jan {Pekárek} and Radim {Hrdý} and Jana {Pekárková} and Jaromír {Hubálek}", title="Design and fabrication of MEMS low power heating membrane", booktitle="XII. Pracovní setkání fyzikálních chemiků a elektrochemiků", year="2012", number="1.", pages="303--304", publisher="Mendelova univerzita v Brně", address="Brno", isbn="978-80-7375-618-5" }