Publication detail

Multi-Wavelength Angle-Resolved Scattering of Randomly Rough Surfaces Based on the Scalar Diffraction Theory

ŠULC, V. VOHÁNKA, J. OHLÍDAL, I. KLAPETEK, P. OHLÍDAL, M. KAUR, N. VIŽĎA, F.

Original Title

Multi-Wavelength Angle-Resolved Scattering of Randomly Rough Surfaces Based on the Scalar Diffraction Theory

Type

journal article in Web of Science

Language

English

Original Abstract

Angle-resolved scattering was measured for four samples of silicon exhibiting different surface roughnesses. The measurements were performed for three wavelengths: 457.9 nm, 514.5 nm, and 647.1 nm. Three approaches were used to evaluate the experimental data. The first approach corresponds to the exact formula derived using the scalar diffraction theory. This formula is quite complicated, and numerical methods must be used for its evaluation. For this reason, another two approaches representing approximations by much simpler formulae were considered. The use of several wavelengths allowed us not only to recover the power spectral density function in a limited interval of spatial frequencies but also to determine the total rms values of the heights, which represent the quantity of roughness for all spatial frequencies. The possibility of recovering the total rms values of the heights using the multi-wavelength approach is the most important result of this work. The results obtained from the scattering experiment and atomic force microscopy are compared.

Keywords

roughness; scalar diffraction theory; angle-resolved scattering

Authors

ŠULC, V.; VOHÁNKA, J.; OHLÍDAL, I.; KLAPETEK, P.; OHLÍDAL, M.; KAUR, N.; VIŽĎA, F.

Released

27. 10. 2023

Publisher

MDPI

Location

BASEL

ISBN

2079-6412

Periodical

Coatings, MDPI

Year of study

13

Number

11

State

Swiss Confederation

Pages count

15

URL

https://www.mdpi.com/2079-6412/13/11/1853

Full text in the Digital Library

http://hdl.handle.net/11012/245087

BibTex

@article{BUT187201,
  author="Václav {Šulc} and Jíří {Vohánka} and Ivan {Ohlídal} and Petr {Klapetek} and Miloslav {Ohlídal} and Nupinder Jeet {Kaur} and František {Vižďa}",
  title="Multi-Wavelength Angle-Resolved Scattering of Randomly Rough Surfaces Based on the Scalar Diffraction Theory",
  journal="Coatings, MDPI",
  year="2023",
  volume="13",
  number="11",
  pages="15",
  doi="10.3390/coatings13111853",
  issn="2079-6412",
  url="https://www.mdpi.com/2079-6412/13/11/1853"
}