Publication detail

Mathematical-Physics Analyses of the Nozzle Shaping at the Aperture Gas Outlet into Free Space under ESEM Pressure Conditions

ŠABACKÁ, P. MAXA, J. ŠVECOVÁ, J. TALÁR, J. BINAR, T. BAYER, R. BAČA, P. DOSTALOVÁ, P. ŠVARC, J.

Original Title

Mathematical-Physics Analyses of the Nozzle Shaping at the Aperture Gas Outlet into Free Space under ESEM Pressure Conditions

Type

journal article in Web of Science

Language

English

Original Abstract

The paper presents a methodology that combines experimental measurements and mathematical-physics analyses to investigate the flow behavior in a nozzle-equipped aperture associated with the solution of its impact on electron beam dispersion in an environmental scanning electron microscope (ESEM). The shape of the nozzle significantly influences the character of the supersonic flow beyond the aperture, especially the shape and type of shock waves, which are highly dense compared to the surrounding gas. These significantly affect the electron scattering, which influences the resulting image. This paper analyzes the effect of aperture and nozzle shaping under specific low-pressure conditions and its impact on the electron dispersion of the primary electron beam.

Keywords

Ansys Fluent; ESEM; critical flow; nozzle; CFD; electron dispersion; shock wave

Authors

ŠABACKÁ, P.; MAXA, J.; ŠVECOVÁ, J.; TALÁR, J.; BINAR, T.; BAYER, R.; BAČA, P.; DOSTALOVÁ, P.; ŠVARC, J.

Released

26. 5. 2024

Publisher

MDPI

Location

BASEL

ISBN

1424-8220

Periodical

SENSORS

Year of study

24

Number

11

State

Swiss Confederation

Pages from

1

Pages to

26

Pages count

26

URL

https://www.mdpi.com/1424-8220/24/11/3436

Full text in the Digital Library

http://hdl.handle.net/11012/249351

BibTex

@article{BUT188700,
  author="Pavla {Šabacká} and Jiří {Maxa} and Jana {Švecová} and Jaroslav {Talár} and Tomáš {Binar} and Robert {Bayer} and Petr {Bača} and Petra {Dostalová} and Jiří {Švarc}",
  title="Mathematical-Physics Analyses of the Nozzle Shaping at the Aperture Gas Outlet into Free Space under ESEM Pressure Conditions",
  journal="SENSORS",
  year="2024",
  volume="24",
  number="11",
  pages="1--26",
  doi="10.3390/s24113436",
  issn="1424-8220",
  url="https://www.mdpi.com/1424-8220/24/11/3436"
}