Publication detail

Stitching accuracy in large area scanning probe microscopy

KLAPETEK, P. NEČAS, D. HEAPS, E. SAUVET, B. KLAPETEK, V. VALTR, M. KORPELAINEN, V. YACOOT, A.

Original Title

Stitching accuracy in large area scanning probe microscopy

Type

journal article in Web of Science

Language

English

Original Abstract

Image stitching is a technique that can significantly enlarge the scan area of scanning probe microscope (SPM) images. It is also the most commonly used method to cover large areas in high-speed SPM. In this paper, we provide details on stitching algorithms developed specifically to mitigate the effects of SPM error sources, namely the presence of scanner non-flatness. Using both synthetic data and flat samples we analyse the potential uncertainty contributions related to stitching, showing that the drift and line mismatch are the dominant sources of uncertainty. We also present the 'flatten base' algorithm that can significantly improve the stitched data results, at the cost of losing the large area form information about the sample.

Keywords

SPM; stitching; uncertainty; data processing

Authors

KLAPETEK, P.; NEČAS, D.; HEAPS, E.; SAUVET, B.; KLAPETEK, V.; VALTR, M.; KORPELAINEN, V.; YACOOT, A.

Released

4. 10. 2024

Publisher

IOP Publishing Ltd

Location

BRISTOL

ISBN

1361-6501

Periodical

Measurement Science and Technology

Year of study

35

Number

12

State

United Kingdom of Great Britain and Northern Ireland

Pages from

125026

Pages to

125037

Pages count

12

URL

https://iopscience.iop.org/article/10.1088/1361-6501/ad7a13

BibTex

@article{BUT193388,
  author="Petr {Klapetek} and David {Nečas} and Edward {Heaps} and Bruno {Sauvet} and Vojtěch {Klapetek} and Miroslav {Valtr} and Virpi {Korpelainen} and Andrew {Yacoot}",
  title="Stitching accuracy in large area scanning probe microscopy",
  journal="Measurement Science and Technology",
  year="2024",
  volume="35",
  number="12",
  pages="125026--125037",
  doi="10.1088/1361-6501/ad7a13",
  issn="1361-6501",
  url="https://iopscience.iop.org/article/10.1088/1361-6501/ad7a13"
}