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SAFARALIEV, G. BILALOV, B. KARDASHOVA, G. SOBOLA, D. GITIKCHIEV, M.
Original Title
Obtaining of nanocrystalline aluminum nitride layers on sapphire
English Title
Type
conference paper
Language
Russian
Original Abstract
This study describes the possibility of AlN nanocrystalline layers formation on the sapphire. Mean hardness of Vickers is defined for AlN in the 20-1400 oC temperature range. It was equal 18 GPa.
English abstract
Keywords
mean hardness, pressure, nitridization, sputtering
Key words in English
Authors
SAFARALIEV, G.; BILALOV, B.; KARDASHOVA, G.; SOBOLA, D.; GITIKCHIEV, M.
Released
26. 5. 2009
Publisher
SPb. Izdatelstvo Polytech. univer.
Location
St.-Petersburg
Pages from
237
Pages to
239
Pages count
3
BibTex
@inproceedings{BUT76501, author="Gadjimet {Safaraliev} and Bilal {Bilalov} and Gulnara {Kardashova} and Dinara {Sobola} and Magomed {Gitikchiev}", title="Obtaining of nanocrystalline aluminum nitride layers on sapphire", booktitle="9-th International conference {"}Films and coatings -2009{"}", year="2009", number="009", pages="237--239", publisher="SPb. Izdatelstvo Polytech. univer.", address="St.-Petersburg" }