Course introduces with fundamentals of plasma physics and chemistry and mechanism of plasma maintaining in common case - i.e. species ionization and excitation, their diffusion, drift motion and recombination, electrical and thermal properties of plasma. The course interests in plasma generation methods - taxonomy of discharges and plasma diagnostics. More detail overview is devoted to processes in simple molecules gases plasma (He, Ne, Ar, H2, N2, O2). The systematic overview of low pressure plasma technology is presented - sputtering, chemical vapour deposition, plasma polymerization, surface treatment and etching.
The conclusion is devoted to plasma use hazards: health hazard (the ultraviolet radiation and radiofrequency electric field influence, toxic products and its disposal) and material degradation and corrosion.