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FSI-TSYAcad. year: 2023/2024
This course familiarizes students with the design and technology of MEMS and NEMS systems production. Through case studies, students will learn to design MEMS sensors and actuators that meet a set of specifications (sensitivity, frequency response, accuracy, linearity). Based on the knowledge of basic principles, students will also be able to design MEMS and NEMS systems, to create their production processes, and to make them themselves.
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Computer-assisted exercise