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Course detail
CEITEC VUT-DS107AAcad. year: 2024/2025
The PhD course focuses on microtechnology, micromachining and microsystems. The main objective is to give theoretical and experimental background in microtechnology methods and techniques available not only in CEITEC shared laboratories. The course focuses in detail on deposition of thin layers and micromachining of silicon to create electro-mechanical systems-on-a-chip called MEMS. Finally, MOS technology will be presented to show basic structures such as transistor, capacitor and diode. The course will help to gain knowledge to use CEITEC technology equipment to create various microsensors/microcomponents/microdevices.
Language of instruction
Mode of study
Guarantor
Department
Entry knowledge
Fundamental knowledge of physical chemistry and physics of materials.
Rules for evaluation and completion of the course
At the end of the course, the student will prepare a 20-minute presentation on the selected deposition method/technique in English, which will be used for the course exam. The evaluation is based on the prepared material, understanding of the subject matter, presentation and literature used.
Aims
Student is going to familiarize with the elemental and advanced methods and techniques for the microstructures and semiconductor devices fabrication, with materials, rules for their creation and modern nanotechnologies in semiconductor industry.Preview of the mehods and techniques in thin-film and semicoductor technology, design skill of the microstructures and nanostructures using advanced techniques of fabrication.
Study aids
Prerequisites and corequisites
Basic literature
Recommended reading