Course detail

Introduction to micro- and nanofabrication

CEITEC VUT-DS132Acad. year: 2024/2025

Not applicable.

Language of instruction

Czech

Mode of study

Not applicable.

Guarantor

Department

Entry knowledge

Not applicable.

Rules for evaluation and completion of the course

Not applicable.

Aims

Not applicable.

Study aids

Not applicable.

Prerequisites and corequisites

Not applicable.

Basic literature

Micro and Nano Fabrication: Tools and Processes Hans H. Gatzen, Volker Saile, and Jürg Leuthold, Springer, 2015, ISBN 978-3-662-44394-1 (CS)

VUT