The project is aimed at achieving and investigating redox-based resistive switching phenomena in nanostructured HfO2/Al2O3 composite films fabricated via the PAA-assisted anodization technique. Various nanostructured HfO2/Al2O3 composite films are produced via electrochemical oxidation of Al/Hf thin films sputter-deposited on Si wafer. Electrodes are deposited on top of fabricated composite films and metal/oxide/metal structures are created. Resistive switching behavior of nanostructured HfO2/Al2O3 composite film in metal/oxide/metal structures is investigated via electronic measurements.

CEITEC VUT-J-20-6513

čeština

Kamnev Kirill, M.Sc., Ph.D. - hlavní řešitel
Mozalev Alexander, Dr. - spoluřešitel

Chytré nanonástroje
- odpovědné pracoviště (5.3.2020 - nezadáno)
Chytré nanonástroje
- spolupříjemce (1.1.2020 - 31.12.2020)
Středoevropský technologický institut VUT
- příjemce (1.1.2020 - 31.12.2020)

Odpovědnost: Kamnev Kirill, M.Sc., Ph.D.