Detail publikačního výsledku

Calculation of the performance of magnetic lenses with limited machining precision

SHÁNĚL, O.; ZLÁMAL, J.; ORAL, M.

Originální název

Calculation of the performance of magnetic lenses with limited machining precision

Anglický název

Calculation of the performance of magnetic lenses with limited machining precision

Druh

Článek WoS

Originální abstrakt

To meet a required STEM resolution, the mechanical precision of the pole pieces of a magnetic lens needs to be determined. A tolerancing plugin in the EOD software is used to determine a configuration which both meets the optical specifications and is cost effective under the constraints of current manufacturing technologies together with a suitable combination of correction elements.

Anglický abstrakt

To meet a required STEM resolution, the mechanical precision of the pole pieces of a magnetic lens needs to be determined. A tolerancing plugin in the EOD software is used to determine a configuration which both meets the optical specifications and is cost effective under the constraints of current manufacturing technologies together with a suitable combination of correction elements.

Klíčová slova

Tolerance analysis; Perturbed geometry; Spot size; Aberrations; Saturated magnetic lens

Klíčová slova v angličtině

Tolerance analysis; Perturbed geometry; Spot size; Aberrations; Saturated magnetic lens

Autoři

SHÁNĚL, O.; ZLÁMAL, J.; ORAL, M.

Rok RIV

2015

Vydáno

01.02.2014

ISSN

0304-3991

Periodikum

ULTRAMICROSCOPY

Svazek

137

Číslo

1

Stát

Nizozemsko

Strany od

1

Strany do

6

Strany počet

6

BibTex

@article{BUT103136,
  author="Ondřej {Sháněl} and Jakub {Zlámal} and Martin {Oral}",
  title="Calculation of the performance of magnetic lenses with limited machining precision",
  journal="ULTRAMICROSCOPY",
  year="2014",
  volume="137",
  number="1",
  pages="1--6",
  doi="10.1016/j.ultramic.2013.10.004",
  issn="0304-3991"
}