Detail publikace

Calculation of the performance of magnetic lenses with limited machining precision

SHÁNĚL, O. ZLÁMAL, J. ORAL, M.

Originální název

Calculation of the performance of magnetic lenses with limited machining precision

Typ

článek v časopise ve Web of Science, Jimp

Jazyk

angličtina

Originální abstrakt

To meet a required STEM resolution, the mechanical precision of the pole pieces of a magnetic lens needs to be determined. A tolerancing plugin in the EOD software is used to determine a configuration which both meets the optical specifications and is cost effective under the constraints of current manufacturing technologies together with a suitable combination of correction elements.

Klíčová slova

Tolerance analysis; Perturbed geometry; Spot size; Aberrations; Saturated magnetic lens

Autoři

SHÁNĚL, O.; ZLÁMAL, J.; ORAL, M.

Rok RIV

2014

Vydáno

1. 2. 2014

ISSN

0304-3991

Periodikum

Ultramicroscopy

Ročník

137

Číslo

1

Stát

Nizozemsko

Strany od

1

Strany do

6

Strany počet

6

BibTex

@article{BUT103136,
  author="Ondřej {Sháněl} and Jakub {Zlámal} and Martin {Oral}",
  title="Calculation of the performance of magnetic lenses with limited machining precision",
  journal="Ultramicroscopy",
  year="2014",
  volume="137",
  number="1",
  pages="1--6",
  doi="10.1016/j.ultramic.2013.10.004",
  issn="0304-3991"
}