Detail publikace
Calculation of the performance of magnetic lenses with limited machining precision
SHÁNĚL, O. ZLÁMAL, J. ORAL, M.
Originální název
Calculation of the performance of magnetic lenses with limited machining precision
Typ
článek v časopise ve Web of Science, Jimp
Jazyk
angličtina
Originální abstrakt
To meet a required STEM resolution, the mechanical precision of the pole pieces of a magnetic lens needs to be determined. A tolerancing plugin in the EOD software is used to determine a configuration which both meets the optical specifications and is cost effective under the constraints of current manufacturing technologies together with a suitable combination of correction elements.
Klíčová slova
Tolerance analysis; Perturbed geometry; Spot size; Aberrations; Saturated magnetic lens
Autoři
SHÁNĚL, O.; ZLÁMAL, J.; ORAL, M.
Rok RIV
2014
Vydáno
1. 2. 2014
ISSN
0304-3991
Periodikum
Ultramicroscopy
Ročník
137
Číslo
1
Stát
Nizozemsko
Strany od
1
Strany do
6
Strany počet
6
BibTex
@article{BUT103136,
author="Ondřej {Sháněl} and Jakub {Zlámal} and Martin {Oral}",
title="Calculation of the performance of magnetic lenses with limited machining precision",
journal="Ultramicroscopy",
year="2014",
volume="137",
number="1",
pages="1--6",
doi="10.1016/j.ultramic.2013.10.004",
issn="0304-3991"
}