Detail publikace

Comparison of Aluminum Oxide Layers Deposited by PECVD and Pulsed Magnetron Sputtering for Dielectric Rear Side Passivation of Crystalline Silicon Solar Cells

HÉGR, O. ČECH, P. BAŘINKA, R. SOBOTA, J. KUSKO, M. KADLEC, S.

Originální název

Comparison of Aluminum Oxide Layers Deposited by PECVD and Pulsed Magnetron Sputtering for Dielectric Rear Side Passivation of Crystalline Silicon Solar Cells

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

The aim of our work is to test other alternative technologies available in the Solartec's research laboratory. There are a standard PECVD technology and a unique OKS („Otto Klobe und Sohn“) sputtering system, specially developed for photovoltaic applications. Sputtering system OKS is based on a batch process for 36 of 5“ Si substrates, where very good homogeneity of dielectric layers (2%) is achieved. OKS sputtering equipment was specially developed for the pilot plant in order to create a viable alternative to existing PECVD and opportunities for a wider use of the system, especially for the formation of multilayer dielectric films suitable for colored solar cells.

Klíčová slova

solar cells, dielectric, passivation layer, aluminum oxide, reactive sputtering, PECVD

Autoři

HÉGR, O.; ČECH, P.; BAŘINKA, R.; SOBOTA, J.; KUSKO, M.; KADLEC, S.

Rok RIV

2013

Vydáno

1. 10. 2013

Nakladatel

WIP Wirtschaft und Infrastruktur GmbH & Co Planungs KG

Místo

München, Germany

ISBN

3-936338-33-7

Kniha

Proceedings of 28th European Photovoltaic Solar Energy Conference and Exhibition

Číslo edice

1

Strany od

2047

Strany do

2049

Strany počet

3

BibTex

@inproceedings{BUT103999,
  author="Ondřej {Hégr} and Pavel {Čech} and Radim {Bařinka} and Jaroslav {Sobota} and Martin {Kusko} and Stanislav {Kadlec}",
  title="Comparison of Aluminum Oxide Layers Deposited by PECVD and Pulsed Magnetron Sputtering for Dielectric Rear Side Passivation of Crystalline Silicon Solar Cells",
  booktitle="Proceedings of 28th European Photovoltaic Solar Energy Conference and Exhibition",
  year="2013",
  number="1",
  pages="2047--2049",
  publisher="WIP Wirtschaft und Infrastruktur GmbH & Co Planungs KG",
  address="München, Germany",
  doi="10.4229/28thEUPVSEC2013-2DV.4.21",
  isbn="3-936338-33-7"
}