Detail publikace

Modeling C-AFM measurement using FEM

MARTINEK, J. ŠLESINGER, R. KLAPETEK, P.

Originální název

Modeling C-AFM measurement using FEM

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

The presented work describes a finite element method based modeling of a conductive AFM measurement process. The C-AFM is a scanning probe microscopy technique for mapping electrical properties of a sample together with its topography. The contact resistance between the probe and the rough surface is modeled in two steps - first the problem of mechanical deformation is solved and then the electrical field, and current, is found. The geometry of the model comes from a real sample topography measured using AFM. The whole multiphysics 3D simulation is done for each data point, which makes the problem possible to be solved only using a supercomputer with many simplifications and optimizations.

Klíčová slova

conductive AFM, finite element method, fem

Autoři

MARTINEK, J.; ŠLESINGER, R.; KLAPETEK, P.

Rok RIV

2014

Vydáno

7. 11. 2014

ISBN

978-80-87294-55-0

Kniha

Nanocon 2014

Strany od

1

Strany do

6

Strany počet

6

BibTex

@inproceedings{BUT112043,
  author="Jan {Martinek} and Radek {Šlesinger} and Petr {Klapetek}",
  title="Modeling C-AFM measurement using FEM",
  booktitle="Nanocon 2014",
  year="2014",
  pages="1--6",
  isbn="978-80-87294-55-0"
}