Detail publikace

Very Low Energy Scanning Electron Microscopy

HRNČIŘÍK, P., MULLEROVÁ, I.

Originální název

Very Low Energy Scanning Electron Microscopy

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

The inelastic and elastic mean free paths (IMFP and EMFP) determine the largest sample thickness usable for transmission electron microscopy (TEM). At primary electron energies normally used for TEM (>50 keV), both mean free paths decrease as the primary energy is lowered. If the primary energy is lowered to below about 100 eV, IMFP is predicted to stop decreasing and to begin growing again [1, 2]. This opens up the exciting possibility of very low voltage TEM of sufficiently thin samples, with poorer resolution but greatly reduced radiation damage compared to conventional TEM.

Klíčová slova v angličtině

SLETEM, SLEEM, SEM

Autoři

HRNČIŘÍK, P., MULLEROVÁ, I.

Vydáno

1. 1. 2004

Nakladatel

Ústav přístrojové techniky AV ČR

Místo

Brno

ISBN

80-239-3246-2

Kniha

Recent Trends in Charged Particle Optics and Surface Physics Instrumentation

Strany od

33

Strany do

34

Strany počet

2

BibTex

@inproceedings{BUT11285,
  author="Petr {Hrnčiřík} and Ilona {Müllerová}",
  title="Very Low Energy Scanning Electron Microscopy",
  booktitle="Recent Trends in Charged Particle Optics and Surface Physics Instrumentation",
  year="2004",
  pages="2",
  publisher="Ústav přístrojové techniky AV ČR",
  address="Brno",
  isbn="80-239-3246-2"
}