Detail publikace

Morphological features in aluminum nitride epilayers prepared by magnetron sputtering

STACH, S. DALLAEVA, D. TALU, S. KASPAR, P. TOMÁNEK, P. GIOVANZANA, S. GRMELA, L.

Originální název

Morphological features in aluminum nitride epilayers prepared by magnetron sputtering

Typ

článek v časopise ve Web of Science, Jimp

Jazyk

angličtina

Originální abstrakt

The aim of this study is to characterize the surface topography of aluminum nitride (AlN) epilayers prepared by magnetron sputtering using the surface statistical parameters, according to ISO 25178-2:2012. To understand the effect of temperature on the epilayer structure, the surface topography was investigated through atomic force microscopy (AFM). AFM data and analysis of surface statistical parameters indicated the dependence of morphology of the epilayers on their growth conditions. The surface statistical parameters provide important information about surface texture and are useful for manufacturers in developing AlN thin films with improved surface characteristics. These results are also important for understanding the nanoscale phenomena at the contacts between rough surfaces, such as the area of contact, the interfacial separation, and the adhesive and frictional properties.

Klíčová slova

aluminum nitride epilayer; atomic force microscopy; magnetron sputtering; substrate; surface roughness

Autoři

STACH, S.; DALLAEVA, D.; TALU, S.; KASPAR, P.; TOMÁNEK, P.; GIOVANZANA, S.; GRMELA, L.

Rok RIV

2015

Vydáno

1. 1. 2015

Nakladatel

De Gruyter Open

Místo

Warszaw, Poland

ISSN

0137-1339

Periodikum

MATERIALS SCIENCE-POLAND

Ročník

33

Číslo

1

Stát

Polská republika

Strany od

175

Strany do

184

Strany počet

10

URL

https://www.sciendo.com/article/10.1515/msp-2015-0036

Plný text v Digitální knihovně

http://hdl.handle.net/11012/201713

BibTex

@article{BUT113282,
  author="Sebastian {Stach} and Dinara {Sobola} and Stefan {Talu} and Pavel {Kaspar} and Pavel {Tománek} and Stefano {Giovanzana} and Lubomír {Grmela}",
  title="Morphological features in aluminum nitride epilayers prepared by magnetron sputtering",
  journal="MATERIALS SCIENCE-POLAND",
  year="2015",
  volume="33",
  number="1",
  pages="175--184",
  doi="10.1515/msp-2015-0036",
  issn="0137-1339",
  url="https://www.sciendo.com/article/10.1515/msp-2015-0036"
}