Detail publikace

Design and Fabrication of Fully Implantable MEMS Cochlea

SVATOŠ, V. PEKÁREK, J. DUŠEK, D. ŽÁK, J. HADAŠ, Z. PRÁŠEK, J.

Originální název

Design and Fabrication of Fully Implantable MEMS Cochlea

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

The micro-electro-mechanical array for application as fully implantable cochlea is presented in this paper. The complete system including a short overview of energy harvesting and the system configuration is proposed. This study mainly covers mechanical properties of cochlea microfabricated silicon structure. Electro-mechanical simulations are proceeded to optimize the material used for resonators, the size of array membranes and to estimate the resistive change due to the input sound signal. The sound is detected by thin SiXNY diaphragm due to resonant frequency and the displacement of the membrane caused by acoustic pressure. The displacement is detected employing piezoresistive electrodes (NiCr). Design and fabrication process based on MEMS technology are described and discussed. The response measurement of the cochlea structure is performed.

Klíčová slova

Cochlear implant; MEMS; proceeding electronics; fabrication; simulation; diaphragm

Autoři

SVATOŠ, V.; PEKÁREK, J.; DUŠEK, D.; ŽÁK, J.; HADAŠ, Z.; PRÁŠEK, J.

Rok RIV

2015

Vydáno

2. 1. 2015

Nakladatel

Elsevier

Místo

Vienna

ISBN

978-3-901509-99-5

Kniha

Proceeedings of DAAAM International Symposium on Intelligent Manufacturing and Automation 2014

ISSN

1876-6102

Periodikum

Energy Procedia

Ročník

100

Číslo

1

Stát

Thajské království

Strany od

1224

Strany do

1231

Strany počet

8

URL

https://www.sciencedirect.com/science/article/pii/S1877705815005147

Plný text v Digitální knihovně

http://hdl.handle.net/11012/194754

BibTex

@inproceedings{BUT114544,
  author="Vojtěch {Svatoš} and Jan {Pekárek} and Daniel {Dušek} and Jaromír {Žák} and Zdeněk {Hadaš} and Jan {Prášek}",
  title="Design and Fabrication of Fully Implantable MEMS Cochlea",
  booktitle="Proceeedings of DAAAM International Symposium on Intelligent Manufacturing and Automation 2014",
  year="2015",
  journal="Energy Procedia",
  volume="100",
  number="1",
  pages="1224--1231",
  publisher="Elsevier",
  address="Vienna",
  doi="10.1016/j.proeng.2015.01.487",
  isbn="978-3-901509-99-5",
  issn="1876-6102",
  url="https://www.sciencedirect.com/science/article/pii/S1877705815005147"
}