Detail publikačního výsledku

Localized aerosol-assisted CVD of nanomaterials for the fabrication of monolithic gas sensor microarrays

Annanouch, F.E.; Gracia, I; Figueras, Llober, E..; Cane, C..; VALLEJOS VARGAS, S

Originální název

Localized aerosol-assisted CVD of nanomaterials for the fabrication of monolithic gas sensor microarrays

Anglický název

Localized aerosol-assisted CVD of nanomaterials for the fabrication of monolithic gas sensor microarrays

Druh

Článek WoS

Originální abstrakt

The self-heating capability of MEMS-based devices is used to grow locally into the sensing active area of monolithic gas sensor microarrays differently-functionalized materials via aerosol-assisted CVD. Results derived from SEM, TEM, XRD and Raman demonstrate the integration of non-functionalized (WO3-x) and functionalized nanostructures with gold (WO3-x/Au) or platinum (WO3-x/Pt) NPs into the array. Tests of these microarrays toward various concentrations of reducing gases show stable and reproducible responses, with the highest responses (R) for WO3-x to carbon monoxide (e.g. R = 4.3-80 ppm), for WO3-x/Au to ethanol (e.g. R = 7-80 ppm) and for WO3-x/Pt to hydrogen (e.g. R = 3.6-80 ppm). Principal component analysis of the sensor response replicates to each gas and concentration suggest that the differences in the sensing properties of each element of the array provide the complementary information to discriminate H2 and EtOH from CO.

Anglický abstrakt

The self-heating capability of MEMS-based devices is used to grow locally into the sensing active area of monolithic gas sensor microarrays differently-functionalized materials via aerosol-assisted CVD. Results derived from SEM, TEM, XRD and Raman demonstrate the integration of non-functionalized (WO3-x) and functionalized nanostructures with gold (WO3-x/Au) or platinum (WO3-x/Pt) NPs into the array. Tests of these microarrays toward various concentrations of reducing gases show stable and reproducible responses, with the highest responses (R) for WO3-x to carbon monoxide (e.g. R = 4.3-80 ppm), for WO3-x/Au to ethanol (e.g. R = 7-80 ppm) and for WO3-x/Pt to hydrogen (e.g. R = 3.6-80 ppm). Principal component analysis of the sensor response replicates to each gas and concentration suggest that the differences in the sensing properties of each element of the array provide the complementary information to discriminate H2 and EtOH from CO.

Klíčová slova

AACVD; Functionalization; Gas sensor arrays; Localized synthesis; Nanostructures; Tungsten oxide

Klíčová slova v angličtině

AACVD; Functionalization; Gas sensor arrays; Localized synthesis; Nanostructures; Tungsten oxide

Autoři

Annanouch, F.E.; Gracia, I; Figueras, Llober, E..; Cane, C..; VALLEJOS VARGAS, S

Rok RIV

2016

Vydáno

01.09.2015

Nakladatel

ELSEVIER SCIENCE SA

Místo

O BOX 564, 1001 LAUSANNE, SWITZERLAND

ISSN

0925-4005

Periodikum

SENSORS AND ACTUATORS B-CHEMICAL

Svazek

216

Číslo

18270

Stát

Švýcarská konfederace

Strany od

374

Strany do

383

Strany počet

216

URL

http://www.sciencedirect.com/science/article/pii/S0925400515004098

BibTex

@article{BUT117947,
  author="Annanouch, F.E. and Gracia, I and Figueras, Llober, E.. and Cane, C.. and VALLEJOS VARGAS, S",
  title="Localized aerosol-assisted CVD of nanomaterials for the fabrication of monolithic gas sensor microarrays",
  journal="SENSORS AND ACTUATORS B-CHEMICAL",
  year="2015",
  volume="216",
  number="18270",
  pages="374--383",
  doi="10.1016/j.snb.2015.03.076",
  url="http://www.sciencedirect.com/science/article/pii/S0925400515004098"
}